The 74th JSAP Autumn Meeting,2013

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Oral presentation

13. Semiconductors A (Silicon) » 13.5 Si process technology

[19p-B4-1~21] 13.5 Si process technology

Thu. Sep 19, 2013 1:30 PM - 7:00 PM B4 (TC2 1F-106)

2:30 PM - 2:45 PM

△ [19p-B4-5] Low Resistance of Heavy Phosphorus-doped Si Film by 2-step RTA

○(M1)Tomohide Wakasugi1, Satoshi Chinen1, Tatsuya Okada1, Hiroshi Aozasa1, Takashi Noguchi1, Taketsugu Itoh2 (Ryukyus Univ.1, Itoh Device Consulting2)

Keywords:2-step RTA,TFT,Low Resistance poly-Si film