The 74th JSAP Autumn Meeting,2013

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13. Semiconductors A (Silicon) » 13.5 Si process technology

[19p-B4-1~21] 13.5 Si process technology

Thu. Sep 19, 2013 1:30 PM - 7:00 PM B4 (TC2 1F-106)

2:45 PM - 3:00 PM

[19p-B4-6] Enhancement of Au induced crystallization for amorphous Ge by electron irradiation

○(B)Kenta Moto1, Shin Sakiyama1, Takatsugu Sakai1, Kazutoshi Nakashima1, Kenichiro Takakura1, Isao Tsunoda1 (Kumamoto National College of Technology1)

Keywords:結晶成長