The 74th JSAP Autumn Meeting,2013

Presentation information

Oral presentation

13. Semiconductors A (Silicon) » 13.6 Silicon devices / Integration technology

[19p-C8-1~18] 13.6 Silicon devices / Integration technology

Thu. Sep 19, 2013 1:15 PM - 6:30 PM C8 (TC3 2F-201)

3:30 PM - 4:00 PM

[19p-C8-8] [Award for Best Review Paper Speech](30 min.)Current Status and Future Perspective in Post-Scaling Technology

Shigeaki Zaima1 (Nagoya Univ.1)