The 74th JSAP Autumn Meeting,2013

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13. Semiconductors A (Silicon) » 13.6 Silicon devices / Integration technology

[20a-C8-1~12] 13.6 Silicon devices / Integration technology

Fri. Sep 20, 2013 9:00 AM - 12:15 PM C8 (TC3 2F-201)

12:00 PM - 12:15 PM

[20a-C8-12] Estimation of Effective Channel Length from MOSFET C-V Curve Measured by Charge-Based Capacitance Measurement

○Katsuhiro Tsuji1, Kazuo Terada1 (Hiroshima City Univ.1)

Keywords:MOSFET,実効チャネル長,CBCM