The 74th JSAP Autumn Meeting,2013

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13. Semiconductors A (Silicon) » 13.1 Basic properties and their evaluation

[20a-C9-1~12] 13.1 Basic properties and their evaluation

Fri. Sep 20, 2013 9:00 AM - 12:15 PM C9 (TC3 2F-202)

11:45 AM - 12:00 PM

[20a-C9-11] Correlation of oxide density and etching rate

○syuhei doi1, ryu hasunuma1, kikuo yamabe1 (TsukubaUniversity1)

Keywords:酸化膜密度,酸化機構