[20a-D3-1~5] 15.7 Fundamentals of epitaxy

[20a-D3-5] [INVITED]Atomic Level In-Situ Monitoring During Epitaxial Growth of Group III Nitrides

Guwangxu Ju¹, Shingo Fuchi^2,5, Masao Tabuchi^2,3, Yoshikazu Takeda⁴, Yoshio Honda¹, Masafumi Yamaguchi^1,2, ^○Hiroshi Amano^1,2 (Nagoya Univ.¹, NUARC², NUSR³, ASTF-AichiSR⁴, Aoyama Gakuin Univ.⁵)

Keywords:その場観察,X線,可視光