Fabrication of Zinc Oxide Thin Film Transistors Using a Facing-Target Sputtering Method

Presentation information

Regular sessions(Poster presentation)

06. Thin Films and Surfaces » 6.3 Oxide-based electronics

Wed. Mar 27, 2013 9:30 AM - 11:30 AM PB2 (2nd gymnasium)

^○Yusuke Okada¹, Ryuji Morita¹, Toshihiko Maemoto¹, Shigehiko Sasa¹ (Osaka Inst.¹)

Keywords:ZnO,対向ターゲット式スパッタ,RFスパッタ