[27p-A3-1~17] 8.4 Plasma etching

[27p-A3-11] △Effects of N⁺ Ion Irradiation on Etching Processes of Magnetic Materials

^○Yu Muraki¹, Hu Li¹, Kazuhiro Karahashi¹, Satoshi Hamaguchi¹ (Graduate School of Engineering, Osaka Univ.¹)

Keywords:エッチング、磁性体、MRAM