[27p-A7-1~17] 8.3 Plasma deposition of thin film and surface treatment

[27p-A7-1] DLC formation by using dielectric barrier discharge plasma CVD

^○Kazuya Tada¹, Hirosi Hamada¹, Koji Oue¹, Shinji Yasui¹ (Nagoya Inst.Tech¹)

Keywords:DLC