[27p-A7-1~17] 8.3 Plasma deposition of thin film and surface treatment

[27p-A7-2] HfO2 Deposition on Graphene with Plasma Enhanced Atomic Layer Deposition

^○Takeshi Kitajima¹, Toshiki Nakano¹ (Nat. Def. Acad.¹)

Keywords:原子層堆積、グラフェン、プラズマ