The 60th JSAP Spring Meeting,2013

Presentation information

Regular sessions(Oral presentation)

08. Plasma Electronics » 8.3 Plasma deposition of thin film and surface treatment

[27p-A7-1~17] 8.3 Plasma deposition of thin film and surface treatment

Wed. Mar 27, 2013 1:30 PM - 6:00 PM A7 (K1 3F-306)

[27p-A7-3] Effect of plasma on/off time on the uniformity of film thickness in internal DLC coating with pulsed microwave plasmas

Ryosuke Matsui1, HIroyuki Kousaka1, Noritsugu Umehara1 (Nagoya Univ.1)

Keywords:ダイヤモンドライクカーボン、マイクロ波、内面成膜