[27p-A7-1~17] 8.3 Plasma deposition of thin film and surface treatment

[27p-A7-3] Effect of plasma on/off time on the uniformity of film thickness in internal DLC coating with pulsed microwave plasmas

Ryosuke Matsui¹, ^○HIroyuki Kousaka¹, Noritsugu Umehara¹ (Nagoya Univ.¹)

Keywords:ダイヤモンドライクカーボン、マイクロ波、内面成膜