[27p-A7-1~17] 8.3 Plasma deposition of thin film and surface treatment

[27p-A7-9] △Studies on Dielectric Film Formation with Plasma Enhanced Mist Chemical Vapor Deposition for Printable Electronics

^○（M1）Kuangda Sun¹, Keigo Takeda¹, Hitoshi Itoh^1,2, Hiroki Kondo¹, Kenji Ishikawa¹, Makoto Sekine¹, Masaru Hori¹ (Nagoya Univ.¹, Tokyo Electron Ltd²)

Keywords:Printable Electronics、絶縁膜製膜、ミストCVD