The 60th JSAP Spring Meeting,2013

Presentation information

Symposium(Oral presentation)

Symposium » ・Present and future of CMOS/MEMS integration

[27p-G9-1~5] Present and future of CMOS/MEMS integration

Wed. Mar 27, 2013 1:30 PM - 4:15 PM G9 (B5 2F-2203)

[27p-G9-1] ▲The outlook for integration devices of MEMS and LSI

Yasushi Goto1 (Hitachi, Ltd. Central Research Lab.1)

Keywords:MEMS、LSI、sensor