[27p-G9-1~5] Present and future of CMOS/MEMS integration

[27p-G9-5] ▲MEMS Design in SPICE Environment

^○Hiroshi Toshiyoshi¹, Toshifumi Konishi², Katsuyuki Machida², Kazuya Masu³ (The Univ. of Tokyo¹, NTT-AT², Tokyo Inst. Tech³)

Keywords:MEMS、SPICE