Symposium(Oral presentation)

[27p-G9-1~5] Present and future of CMOS/MEMS integration

Wed. Mar 27, 2013 1:30 PM - 4:15 PM G9 (B5 2F-2203)

△：Young Scientist Oral Presentation Award Applied
▲：English Presentation
▼：Both Award Applied and English Presentation

[27p-G9-1] ▲The outlook for integration devices of MEMS and LSI

^○Yasushi Goto¹ (Hitachi, Ltd. Central Research Lab.¹)

^○Takayuki Ohba¹ (The Univ. of Tokyo¹)

Chuanwei Wang¹, Chih-Ming Sun¹, Ming-Han Tsai¹, Yu-Chia Liu¹, ^○Weileun Fang¹ (National Tsing Hua Univ.¹)

^○Makoto Ikeda¹ (Univ. of Tokyo¹)

^○Hiroshi Toshiyoshi¹, Toshifumi Konishi², Katsuyuki Machida², Kazuya Masu³ (The Univ. of Tokyo¹, NTT-AT², Tokyo Inst. Tech³)