[28a-G19-1~11] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[28a-G19-4] △Growth Control of Al_2xGa_2-2xO₃ Films on β-Ga₂O₃ (201) Substrates

^○Akira Mukai¹, Takayoshi Oshima¹, Kohei Sasaki², Takekazu Masui³, Akito Kuramata², Shigenobu Yamakoshi², Akira Ohtomo^1,4 (Tokyo Tech¹, Tamura Corp.², KOHA Co., Ltd³, TIES & MCES⁴)

Keywords:酸化ガリウム、薄膜、結晶成長