[28a-G21-1~11] 15.4 III-V-group nitride crystals

[28a-G21-9] △Crystallographic characterization of AlN on trench-patterned 6H-SiC substrates by X-ray microdiffraction

^○Kunihiko Nakamura¹, Dinh Khan¹, Takuji Arauchi¹, Shotaro Takeuchi¹, Yoshiaki Nakamura^1,2, Hideto Miyake³, Kazumasa Hiramatsu³, Yasuhiko Imai⁴, Shigeru Kimura⁴, Akira Sakai¹ (Osaka Univ.¹, PRESTO-JST², Mie Univ.³, JASRI/SPring-8⁴)

Keywords:X線回折、AlN、XRD