[28a-G9-1~11] 13.6 Silicon devices / Integration technology

[28a-G9-9] ▲Stress Condition Dependence of |Vth| Shift and Variability in OFF-State Stress in pFETs for Post-Fabrication Self-Improvement of SRAM Stability

^○Nurul Ezaila Alias¹, Anil Kumar², Saraya Takuya³, Miyano Shinji⁴, Hiramoto Toshiro⁵ (Univ. of Tokyo¹, Univ. of Tokyo², Univ. of Tokyo³, STARC⁴, Univ. of Tokyo⁵)

Keywords:Variability、OFF-state stress