[28p-G19-1~17] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[28p-G19-1] Production mechanism of ZnO films from dimethylzinc and catalytically produced water

^○Hironobu Umemoto¹, Takuma Ishikawa¹, Yushin Nishihara¹, Kanji Yasui², Hiroshi Nishiyama², Yasunobu Inoue², Mitsuru Ushijima³ (Shizuoka Univ.¹, Nagaoka Univ. Tech.², Tokyo Electron³)

Keywords:酸化亜鉛薄膜、気相診断