[28p-G2-1~16] 13.3 Insulator technology

[28p-G2-10] △Thermal stability of Metal/High-k/GeO₂/Ge stacks fabricated by MBD method

^○（M2）Iori Hideshima¹, Ryouhei Tanaka¹, Yuya Minoura¹, Akitaka Yoshigoe², Yuuden Teraoka², Takuji Hosoi¹, Takayoshi Shimura¹, Heiji Watanabe¹ (Osaka University¹, JAEA²)

Keywords:ゲルマニウム、MOS、Metal/High-k