[28p-G2-1~16] 13.3 Insulator technology

[28p-G2-11] △Correlation between Interface Structures due to Thermal Oxidation and Interface Properties at Al₂O₃/Ge Interfaces

^○Shigehisa Shibayama¹, Kimihiko Kato^1,2, Mitsuo Sakashita¹, Wakana Takeuchi¹, Noriyuki Taoka¹, Osamu Nakatsuka¹, Shigeaki Zaima¹ (Graduate School of Eng., Nagoya Univ.¹, Research Fellow of Japan Society for the Promotion of Science²)

Keywords:Al2O3/Ge、熱酸化、界面特性