Accurate characterization of interface-state densities for Ge-MOS capacitors

Presentation information

Regular sessions(Oral presentation)

13. Semiconductors A (Silicon) » 13.3 Insulator technology

Thu. Mar 28, 2013 2:30 PM - 6:45 PM G2 (B5 1F-2102)

^○Hiroshi Nakashima¹, Dong Wang², Keisuke Yamamoto^1,3 (Kyushu Univ. KASTEC¹, Kyushu Univ. I-EggS², JSPS research fellow³)

Keywords:MOS, MIS、DLTS、interface state density