[28p-G2-1~16] 13.3 Insulator technology

[28p-G2-5] Variation of Water Solubility of GeO₂ Thin Films Using Post Metallization Annealing

^○Marina Yamaguchi¹, Yuya Nakatani¹, Yoshitaka Iwazaki¹, Tomo Ueno¹ (Tonyo Univ. of Agri. & Tech.¹)

Keywords:GeO_{2、Water Solubility、Post Metalization Annealing}