The 60th JSAP Spring Meeting,2013

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Regular sessions(Oral presentation)

13. Semiconductors A (Silicon) » 13.5 Si process technology

[28p-G6-1~17] 13.5 Si process technology

Thu. Mar 28, 2013 2:00 PM - 6:30 PM G6 (B5 1F-2106)

[28p-G6-16] △Control of Si Lateral Growth Direction by Laser Spot’s Long Axis Inclinationes

○（B）Ryota Morioka1, Wenchang Yeh1 (Shimanedai sougourikou1)

Keywords:レーザ結晶化