[29p-B1-1~20] 7.4 Nanoimprint

[29p-B1-4] Fabrication of nano-structure on a glass by electrostatic imprint process

^○（B）Naoki Ikutame¹, Hiroshi Ikeda¹, Daisuke Sakai², Kenji Harada², Junji Nishii¹ (Hokkaido Univ.¹, Kitame Inst. of Tech.²)

Keywords:glass、imprint、electrostatic