[29p-B2-1~18] 7.6 Ion beams

[29p-B2-3] Development of cluster ion source for high spatial resolution SIMS

^○Sota Torii¹, Toshio Seki^1,2, Takaaki Aoki^1,2, jiro Matsuo^1,2 (Kyoto Univ.¹, JST-CREST²)

Keywords:集束、SIMS