[29p-B8-1~10] Frontiers of process technology for Si-related thin films

[29p-B8-10] Photon energy dependence of boron activation by soft X-ray irradiation

^○Akira Heya¹, Takuto Fukuoka¹, Naoto Matsuo¹, Kazuhiro Kanda², Takashi Noguchi³ (Dept. Mat. Sci. and Chem. Univ. of Hyogo¹, LASTI Univ. of Hyogo², The Univ. of Ryukyu³)

Keywords:低温活性化、軟X線、ホウ素