[29p-G16-1~21] 15.8 Crystal evaluation, nanoimpurities and crystal defects

[29p-G16-11] First-Principles Analysis on Gettering of Metallic Impurities by Microscopic Defects

^○Takahiro Maeta¹, Koji Sueoka¹, Koji Izunome² (Okayama Pref. Univ.,Dept. of System Engineering¹, GlobalWafers Japan Co., Ltd.²)

Keywords:第一原理、ゲッタリング、微小欠陥