[29p-G16-1~21] 15.8 Crystal evaluation, nanoimpurities and crystal defects

[29p-G16-9] First-principles calculation on interaction of dopant-point defect complex and metal atom in Si crystal

^○（M2）Takeshi Iwasaki¹, Koji Sueoka¹, Jun Komachi², Koichiro Saga² (Okayama Pref. Univ.¹, Sony Corporation²)

Keywords:点欠陥、ゲッタリング、第一原理計算