[29p-PA4-1~11] 22.1Joint Session L "Basics and applications of MEMS, NEMS: Integration of diverse functionalities"

[29p-PA4-4] Device Evaluation for Arrayed CMOS-MEMS Accelerometers

^○Ken Kagaya¹, Toshifumi Konishi², Daisuke Yamane¹, Gou Motohashi¹, Takaaki Matsushima², Hiroyuki Ito¹, Noboru Ishihara¹, Hiroshi Toshiyoshi³, Katsuyuki Machida^1,2, Kazuya Masu¹ (Tokyo Inst. of Tech.¹, NTT Advanced Technology Corp.², The Univ. of Tokyo³)

Keywords:CMOS-MEMS、加速度センサ