[29p-PA4-1~11] 22.1Joint Session L "Basics and applications of MEMS, NEMS: Integration of diverse functionalities"

[29p-PA4-7] Effect of hydrogen treatment on characteristics of titanium oxide nanotube micro hydrogen gas sensors

^○Tsubasa Tobe¹, Ryota Kojima¹, Yasuo Kimura¹, Michio Niwano¹ (Laboratory for Nanoelectronics and Spintronics, RIEC, Tohoku Univ.¹)

Keywords:酸化チタンナノチューブ、ガスセンサ