[29p-PB1-1~20] 13.3 Insulator technology

[29p-PB1-10] Reliability measurement of La-silicate gate dielectrics with tungsten carbide gate electrodes

^○Shuhei Hosoda¹, Tuokedaerhan Kamale¹, Kuniyuki Kakushima², Ahmet Parhat¹, Yoshinori Kataoka², Akira Nishiyama², Nobuyuki Sugii², Kazuo Tsutsui², Kenji Natori¹, Takeo Hattori¹, Hiroshi Iwai¹ (Tokyo Tech,FRC¹, Tokyo Tech.IGSSE²)

Keywords:high-k