The 60th JSAP Spring Meeting,2013

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Regular sessions(Poster presentation)

13. Semiconductors A (Silicon) » 13.3 Insulator technology

[29p-PB1-1~20] 13.3 Insulator technology

Fri. Mar 29, 2013 1:30 PM - 3:30 PM PB1 (2nd gymnasium)

[29p-PB1-5] Detrap of trapped charge in SiO2 film

○（M1）yusuke takigaura1, ryu hasunuma2, kikuo yamabe3 (Tsukuba Univ.1, Tsukuba Univ.2, Tsukuba Univ.3)

Keywords:デトラップ、捕獲電荷