[29p-PB1-1~20] 13.3 Insulator technology

[29p-PB1-6] First-principles analysis on mechanical properties of SiO2 and GeO2 crystal and amorphous

^○（M1）Takahiro Hosokawa¹, Koji Sueoka¹, Koji Araki², Koji Izunome² (Okayama Pref. Univ.¹, Global Wafers Co.²)

Keywords:絶縁膜、機械的性質、第一原理計算