The 60th JSAP Spring Meeting,2013

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Regular sessions(Oral presentation)

06. Thin Films and Surfaces » 6.3 Oxide-based electronics

[30a-F2-1~10] 6.3 Oxide-based electronics

Sat. Mar 30, 2013 9:00 AM - 11:45 AM F2 (E3 3F-303)

[30a-F2-4] Fabrication of molybdenum oxide films using plasma assisted deposition

○Kousuke Tada1, Yukie Saito1, Takahisa Ichinohe1 (Tokyo National College of Technology1)

Keywords:モリブデン酸化物、モリブデン酸化物