[30a-G7-1~10] 14.1 Physical properties of exploratory materials

[30a-G7-3] Characterization of Mg₂Si films prepared by sputtering method

^○Shota Ogawa¹, Atsuo Katagiri¹, Masaaki Matsushima¹, Kensuke Akiyama^1,2, Hiroshi Funakubo¹ (Tokyo Inst. of Tech.¹, Kanagawa Inds. Tech. Cent.²)

Keywords:熱電材料、薄膜、スパッタリング法