The 75th JSAP Autumn Meeting, 2014

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Symposium » Interfacial nano electrochemistry: Research frontiers of semiconductor wetprocesses

[17p-A14-1~12] Interfacial nano electrochemistry: Research frontiers of semiconductor wetprocesses

Wed. Sep 17, 2014 1:30 PM - 5:30 PM A14 (E305)

4:15 PM - 4:30 PM

△ [17p-A14-8] Fabrication of Nanogap Electrodes Using Semiconductor Process

○Yasuhito Yoshimizu1, Yusuke Tanaka1, Hiroshi Tomita1 (TOSHIBA Corp.1)

Keywords:ナノギャップ,ウェット,エッチング