The 75th JSAP Autumn Meeting, 2014

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Symposium » Interfacial nano electrochemistry: Research frontiers of semiconductor wetprocesses

[17p-A14-1~12] Interfacial nano electrochemistry: Research frontiers of semiconductor wetprocesses

Wed. Sep 17, 2014 1:30 PM - 5:30 PM A14 (E305)

4:30 PM - 4:45 PM

[17p-A14-9] Research for Mechanism of Abnormal Oxidation on Copper Surface

○Kohei Hayashi1, Takayuki Kajikawa1, Tsutomu Watahiki1 (Wako pure chemical industries, Ltd1)

Keywords:半導体,洗浄剤,CMP