[17p-A16-1~14] 13.4 Devices/Integration Technologies

[17p-A16-10] Fabrication and Characterization of 3D Fin-Channel MANOS Type Flash Memory

^○Yongxun Liu¹, Toshihide Nabatame², Takashi Matsukawa¹, Kazuhiko Endo¹, Shinichi Ouchi¹, Junichi Tsukada¹, Hiromi Yamauchi¹, Yuki Ishikawa¹, Wataru Mizubayashi¹, Yukinori Morita¹, Shinji Migita¹, Hiroyuki Ota¹, Toyohiro Chikyow², Meishoku Masahara¹ (AIST¹, NIMS²)

Keywords:Flash memory,FinFET