[17p-A16-1~14] 13.4 Devices/Integration Technologies

[17p-A16-9] Improvement of Epitaxial Channel Quality and Its Impact to Tunnel FET Performances

^○Yukinori Morita¹, Takahiro Mori¹, Shinji Migita¹, Wataru Mizubayashi¹, Koichi Fukuda¹, Takashi Matsukawa¹, Kazuhiko Endo¹, Shin-ichi O'uchi¹, Yongxun Liu¹, Meishoku Masahara¹, Hiroyuki Ota¹ (AIST¹)

Keywords:トンネルFET,TFET,エピタキシャル成長