The 75th JSAP Autumn Meeting, 2014

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Oral presentation

15. Crystal Engineering » 15.6 IV-group-based compounds

[17p-A17-1~14] 15.6 IV-group-based compounds

Wed. Sep 17, 2014 2:00 PM - 6:00 PM A17 (E308)

3:00 PM - 3:15 PM

[17p-A17-5] Reliability improvement in Gate Silicon Dioxide even on Silicon Carbide

○Masashi Minami1 (PHNITEC SEMICONDUCTOR1)

Keywords:SiC,Gate Oxide,Reliability