[17p-C6-1~10] 3.13 半導体光デバイス

▲ [17p-C6-4] Dark current reduction of waveguide InGaAs MSM photodetector on III-V CMOS photonics platform by InAlAs cap layer

^○（DC）Yongpeng Cheng，一宮佑希，竹中充，高木信一 (東大院工)

キーワード：waveguide photodetector,III-V-OI wafer,monolithic integration