The 75th JSAP Autumn Meeting, 2014

Presentation information

Oral presentation

13. Semiconductors A (Silicon) » 13.4 Devices/Integration Technologies

[18a-A16-1~11] 13.4 Devices/Integration Technologies

Thu. Sep 18, 2014 9:00 AM - 12:00 PM A16 (E307)

9:00 AM - 9:15 AM

[18a-A16-1] Systematic Statistical Analysis of Characteristics Variability in Fully Depleted Silicon-on-Thin-BOX (SOTB) MOSFETs and Bulk MOSFETs

○(M1)Katsuhisa Tanaka1, Tomoko Mizutani1, Yoshiki Yamamoto2, Hideki Makiyama2, Tomohiro Yamashita2, Hidekazu Oda2, Shiro Kamohara2, Nobuyuki Sugii2, Takuya Saraya1, Masaharu Kobayashi1, Toshiro Hiramoto1 (IIS, Univ. of Tokyo1, LEAP2)

Keywords:SOI,ばらつき