Effects of Sintering Temperature and Time on Properties of Spin-coated IGZO Thin-films

Presentation information

Oral presentation

Joint Session K "Wide bandgap oxide semiconductor materials and devices" » Nanocarbon Technology

Thu. Sep 18, 2014 1:15 PM - 5:30 PM A12 (E301)

2:00 PM - 2:15 PM

^○Dongjing Chen¹, Takaaki Morimoto¹, Nobuko Fukuda³, Yoshimichi Ohki^1,2 (Waseda Univ.¹, RIMST², FELC, AIST³)

Keywords:酸化物半導体薄膜,IGZO