9:00 AM - 9:15 AM
▼ [19a-A17-1] Evidence for Si up-diffusion during scavenging of interfacial SiO2 in HfO2/SiO2/Si stack
Keywords:SiO2 Scavenging,Si diffusion,SiO desorption
Oral presentation
13. Semiconductors A (Silicon) » 13.2 Insulator technology
Fri. Sep 19, 2014 9:00 AM - 12:30 PM A17 (E308)
9:00 AM - 9:15 AM
Keywords:SiO2 Scavenging,Si diffusion,SiO desorption