The 75th JSAP Autumn Meeting, 2014

Presentation information

Oral presentation

13. Semiconductors A (Silicon) » 13.2 Insulator technology

[19p-A17-1~11] 13.2 Insulator technology

Fri. Sep 19, 2014 2:00 PM - 5:00 PM A17 (E308)

2:00 PM - 2:15 PM

[19p-A17-1] [Young Scientist Oral Presentation Award Speech](15min.)
Electron mobility improvement due to GaOx passivation layer formed by pre-deposition anneal in HfO2/In0.53Ga0.47As nMISFET with sub-1.0 nm EOT

Minoru Oda1, Toshifumi Irisawa1, Jevasuwan Wipakorn1, Tatsuro Maeda1, Yuuichi Kamimuta1, Tsutomu Tezuka1 (AIST-GNC1)