The 75th JSAP Autumn Meeting, 2014

Presentation information

Oral presentation

08. Plasma Electronics » 8.4 Plasma etching

[19p-S10-1~18] 8.4 Plasma etching

Fri. Sep 19, 2014 2:15 PM - 7:00 PM S10 (S10)

4:15 PM - 4:30 PM

[19p-S10-9] Instantaneous generation of many flaked particles caused by micro-arc discharge in mass production plasma etching equipment

Yuji Kasashima1, Taisei Motomura1, Fumihiko Uesugi1 (AIST1)

Keywords:プラズマエッチング,パーティクル,異常放電