The 75th JSAP Autumn Meeting, 2014

Presentation information

Oral presentation

13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration

[20a-A19-1~12] 13.3 Si Process・Interconnect・MEMS・Integration

Sat. Sep 20, 2014 9:00 AM - 12:15 PM A19 (E311)

11:00 AM - 11:15 AM

[20a-A19-8] Minimal System of Micro-Plasma Etcher Equipment(III)

Hiroyuki Tanaka1, Yoshiki Shimizu1,2, Hisato Ogiso1,2, Shizuka Nakano1,2, Shunichiro Shinbori3, Maki Katohgi3, Satoshi Takahashi3, Yuya Shirayama3, Shuntaro Yokosuka3, Sommawan Khumpuang1,2, Shiro Hara1,2 (MINIMAL1, AIST2, SANYU3)

Keywords:ミニマル,マイクロプラズマ