[20a-A20-1~15] 15.8 Crystal evaluation, impurities and crystal defects

△ [20a-A20-2] Infrared absorption measurement of low concentration carbon in Si crystal (V) Elimination of phonon interference and standardization

^○Kaori Watanabe¹, Naohisa Inoue^2,6, Yasunori Goto³, Hirofumi Seki⁴, Hiroyuki Uno⁵, Yuichi Kawamura⁶ (Systems Engineering Co.¹, Tokyo U. Agri. Technol.², Toyota Motor Co.³, Toray Research Center⁴, SHI⁵, Osaka Pref. Univ.⁶)

Keywords:シリコン,赤外吸収,炭素