Session information

Oral presentation

07. Beam Technology and Nanofabrication » 7.6 Ion beams

[17p-F4-1~13] 7.6 Ion beams

Mon. Mar 17, 2014 2:00 PM - 5:30 PM F4 (F304)

△：Young Scientist Oral Presentation Award Applied
▲：English Presentation
▼：Both Award Applied and English Presentation

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Lunch 12:30〜14:00 (12:30 PM - 2:00 PM)

2:00 PM - 2:15 PM

[17p-F4-1] Irradiation Effects on Solid Surface by Ionic Liquid EMIM-N(CN)2 Ion Beams

Takuya Hamaguchi¹, ^○yuki Hoshide¹, Mitsuaki Takeuchi¹, Hiromichi Ryuto¹, Gikan Takaoka¹ (Kyoto Univ.¹)

2:15 PM - 2:30 PM

[17p-F4-2] Surface Modification of Glass Substrate by C_nH_2n+1⁺ Polyatomic Ion Beam

Kyouhei Hayashi¹, ^○Mitsuaki Takeuchi¹, Hiromichi Ryuto¹, Gikan Takaoka¹ (Kyoto Univ.¹)

2:30 PM - 2:45 PM

[17p-F4-3] Estimation of Gas Cluster Formation using Semi-Empirical Model

^○Kazumasa Takahashi¹, Mitsuo Nakajima², Jun Hasegawa², Kazuhiko Horioka², Toru Sasaki¹, Takashi Kikuchi¹, Tsukasa Aso¹, Nob. Harada¹ (Nagaoka Univ. of Tech.¹, Tokyo Tech.²)

2:45 PM - 3:00 PM

[17p-F4-4] Development of neutral cluster velocity measurement technology

^○Toshio Seki¹, Kazuhiro Karahashi², Takaaki Aoki¹, Jiro Matsuo¹ (Kyoto Univ.¹, Osaka Univ.²)

3:00 PM - 3:15 PM

[17p-F4-5] Room-temperature oxidation and planarization of 4H-SiC surface by GCIB

^○Ryo Hinoura¹, Akira Yamaguchi¹, Makoto Kojima¹, Noriaki Toyoda¹, Ken-ichi Hara², Isao Yamada¹ (Graduate school of engineering, Univ. of Hyogo¹, Tokyo Electron Limited²)

3:15 PM - 3:30 PM

[17p-F4-6] Smoothing of Ru thin film with Gas Cluster Ion Beam (I)

^○（M2）Akira Yamaguchi¹, Inaba Kenji³, Ryo Hinoura¹, Noriaki Toyoda¹, Ken-ichi Hara², Nozomu Hatakeyama³, Akira Miyamoto³, Isao Yamada¹ (Grad. School of Engineering, Univ. of Hyogo¹, Tokyo Electron limted², New Industry Creation Hatchery Center, Tohoku Univ.³)

3:30 PM - 3:45 PM

△ [17p-F4-7] Smoothing of Ru thin film with Gas Cluster Ion Beam (II)

^○（M2）Akira Yamaguchi¹, Ryo Hinoura¹, Noriaki Toyoda¹, Ken-ichi Hara², Isao Yamada¹ (Grad. school of engineering, Univ. of Hyogo¹, Tokyo Electron limited²)

Break 15:45〜16:00 (3:45 PM - 4:00 PM)

4:00 PM - 4:15 PM

[17p-F4-8] Irradiation Effects of Acetone Cluster Ion Beam on Photoresist

Yuki Kakumoto¹, ^○Akito Fujita¹, Hiromichi Ryuto¹, Mitsuaki Takeuchi¹, Gikan Takaoka¹ (Kyoto Univ.¹)

4:15 PM - 4:30 PM

[17p-F4-9] Luminescence induced by water cluster ion bombardment on solid surfaces

^○（M2）Akira Sakata¹, Musumeci Francesco^1,2, Hiromichi Ryuto¹, Mitsuaki Takeuchi¹, Gikan Takaoka¹ (Kyoto Univ.¹, Catania Univ.²)

4:30 PM - 4:45 PM

[17p-F4-10] Secondary ion mass spectrometry with water cluster ion beam

^○Shunichiro Nakagawa¹, Toshio Seki^1,2, Takaaki Aoki^1,2, Jiro Matsuo^1,2 (Kyoto Univ.¹, JST-CREST²)

4:45 PM - 5:00 PM

[17p-F4-11] Secondary ion measurement of amino acid molecules with noble gases and molecule cluster ion beams

^○Issei Ihara¹, Kousuke Moritani¹, Masanori Kanai¹, Norio Inui¹, Kozo Mochiji¹ (Univ. of Hyogo¹)

5:00 PM - 5:15 PM

[17p-F4-12] 3D molecular imaging of organic multilayer film by SIMS using gas cluster ion beam.

^○Keisuke Wakamoto¹, Shunichiro Nakagawa¹, Toshio Seki¹, Takaaki Aoki¹, Jiro Matsuo¹ (Kyoto Univ.¹)

5:15 PM - 5:30 PM

[17p-F4-13] Mass imaging of cell level with Ar cluster ion beam

^○Sota Torii¹, Toshio Seki¹, Takaaki Aoki¹, Jiro Matsuo¹ (Kyoto Univ.¹)

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